Inventor
LEE KEUMSIL
US4 patents
Patents
4 patentsUS12283504B2Apr 22, 2025
Contact area size determination between 3D structures in an integrated semiconductor sample
ZEISS CARL SMT GMBH0 citations58
US11915908B2Feb 27, 2024
Method for measuring a sample and microscope implementing the method
ZEISS CARL SMT GMBH0 citations58
US11436506B2Sep 6, 2022
Method and devices for determining metrology sites
ZEISS CARL SMT GMBH0 citations58
US12288705B2Apr 29, 2025
FIB-SEM 3D tomography for measuring shape deviations of HAR structures
ZEISS CARL SMT GMBH0 citations47