Inventor
SASAKI MITSUTOSHI
JP5 patents
Patents
5 patentsUS10933448B2Mar 2, 2021
Substrate treatment apparatus and substrate treatment method
SCREEN HOLDINGS CO LTD1 citations59
US12500099B2Dec 16, 2025
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations54
US12400868B2Aug 26, 2025
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations50
US11699601B2Jul 11, 2023
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations48
US12538731B2Jan 27, 2026
Batch substrate treatment apparatus
SCREEN HOLDINGS CO LTD0 citations44