Inventor

LEHMANN VOLKER E

US2 patents

Patents

2 patents

US5024723AJun 18, 1991

Method of producing a thin silicon on insulator layer by wafer bonding and chemical thinning

GOESELE ULRICH M131 citations93

US5206523AApr 27, 1993

Microporous crystalline silicon of increased band-gap for semiconductor applications

GOESELE ULRICH M39 citations88