Inventor
KOYAMA NORIAKI
JP17 patents
⚠️ This page may combine multiple inventors who share the name “KOYAMA NORIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS7751921B2Jul 6, 2010
Semiconductor manufacturing apparatus, method of detecting abnormality, identifying cause of abnormality, or predicting abnormality in the semiconductor manufacturing apparatus, and storage medium storing computer program for performing the method
TOKYO ELECTRON LTD15 citations83
US7974729B2Jul 5, 2011
Server device and program with sub-recipe measurement communication
TOKYO ELECTRON LTD3 citations62
US7896649B2Mar 1, 2011
Heat system, heat method, and program
TOKYO ELECTRON LTD4 citations62
US8355808B2Jan 15, 2013
Server device of group management system having function of performing fault detection and program
TOKYO ELECTRON LTD1 citations45
US11822319B2Nov 21, 2023
Semiconductor system
TOKYO ELECTRON LTD0 citations42
US11567485B2Jan 31, 2023
Substrate processing system and method for monitoring process data
TOKYO ELECTRON LTD0 citations42
US8055391B2Nov 8, 2011
Server device and program
TOKYO ELECTRON LTD0 citations41
US7869888B2Jan 11, 2011
Information processing apparatus, semiconductor manufacturing system, information processing method, and storage medium
TOKYO ELECTRON LTD0 citations41
US9703284B2Jul 11, 2017
Group management system and recording medium
TOKYO ELECTRON LTD0 citations40
US10734291B2Aug 4, 2020
Abnormality detection apparatus
TOKYO ELECTRON LTD0 citations32
TOSHIBA KK
3 patentsUS5845125ADec 1, 1998
Debugger using class information and dynamic instance inter-relationships
TOSHIBA KK65 citations95
US7814144B2Oct 12, 2010
Recommending system, recommending server, content recommending method, and recommending program product
TOSHIBA KK25 citations90
US6131109AOct 10, 2000
Multitask processor, a multitask processing method, a multitask processing display method and a storage medium for processing by correlating task and object
TOSHIBA KK12 citations69