Inventor
MOHONDRO ROBERT DOUGLAS
US7 patents
⚠️ This page may combine multiple inventors who share the name “MOHONDRO ROBERT DOUGLAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
3 patentsUS6503693B1Jan 7, 2003
UV assisted chemical modification of photoresist
AXCELIS TECH INC48 citations91
US6605484B2Aug 12, 2003
Process for optically erasing charge buildup during fabrication of an integrated circuit
AXCELIS TECH INC9 citations70
US6803319B2Oct 12, 2004
Process for optically erasing charge buildup during fabrication of an integrated circuit
AXCELIS TECH INC0 citations49
FUSION SYSTEMS CORP
3 patentsUS6117622ASep 12, 2000
Controlled shrinkage of photoresist
FUSION SYSTEMS CORP39 citations86
US6214524B1Apr 10, 2001
Controlled amine poisoning for reduced shrinkage of features formed in photoresist
FUSION SYSTEMS CORP7 citations71
US6057084AMay 2, 2000
Controlled amine poisoning for reduced shrinkage of features formed in photoresist
FUSION SYSTEMS CORP13 citations71