Inventor
NAITO YOKO
JP5 patents
Patents
5 patentsUS6333269B2Dec 25, 2001
Plasma treatment system and method
TOKYO ELECTRON LTD67 citations95
US6215087B1Apr 10, 2001
Plasma film forming method and plasma film forming apparatus
TOKYO ELECTRON LTD57 citations95
US6355902B2Mar 12, 2002
Plasma film forming method and plasma film forming apparatus
TOKYO ELECTRON LTD23 citations92
US6218299B1Apr 17, 2001
Semiconductor device and method for producing the same
TOKYO ELECTRON LTD47 citations92
US6443165B1Sep 3, 2002
Method for cleaning plasma treatment device and plasma treatment system
TOKYO ELECTRON LTD24 citations91