Inventor

HINOGAMI REIKO

JP3 patents

Patents

3 patents

US6562710B2May 13, 2003

Semiconductor device and method for fabricating the same

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD9 citations71

US6514647B1Feb 4, 2003

Photomask, resist pattern formation method, method of determining alignment accuracy and method of fabricating semiconductor device

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD10 citations71

US7337423B2Feb 26, 2008

Mask pattern generating method and mask pattern generating apparatus

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD1 citations45