Inventor
ALLGAEUER MICHAEL
DE7 patents
⚠️ This page may combine multiple inventors who share the name “ALLGAEUER MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HEIDENHAIN GMBH DR JOHANNES
6 patentsUS5786931AJul 28, 1998
Phase grating and method of producing phase grating
HEIDENHAIN GMBH DR JOHANNES32 citations92
US5493397AFeb 20, 1996
Multi-coordinate measuring system using a cross grating to create a plurality of diffraction beams emanating from two or more coordinate directions
HEIDENHAIN GMBH DR JOHANNES16 citations73
US5187545AFeb 16, 1993
Integrated optical position measuring device and method with reference and measurement signals
HEIDENHAIN GMBH DR JOHANNES12 citations71
US5127733AJul 7, 1992
Integrated optical precision measuring device
HEIDENHAIN GMBH DR JOHANNES17 citations71
US5963330AOct 5, 1999
Optical position measuring device
HEIDENHAIN GMBH DR JOHANNES5 citations60
US6800404B2Oct 5, 2004
Method for producing a self-supporting electron-optical transparent structure, and structure produced in accordance with the method
HEIDENHAIN GMBH DR JOHANNES0 citations50