Inventor
NGUYEN KHIEM K
US12 patents
⚠️ This page may combine multiple inventors who share the name “NGUYEN KHIEM K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS7601272B2Oct 13, 2009
Method and apparatus for integrating metrology with etch processing
APPLIED MATERIALS INC26 citations92
US8017029B2Sep 13, 2011
Plasma mask etch method of controlling a reactor tunable element in accordance with the output of an array of optical sensors viewing the mask backside
APPLIED MATERIALS INC7 citations83
US8002946B2Aug 23, 2011
Mask etch plasma reactor with cathode providing a uniform distribution of etch rate
APPLIED MATERIALS INC8 citations83
US7976671B2Jul 12, 2011
Mask etch plasma reactor with variable process gas distribution
APPLIED MATERIALS INC20 citations83
US7967930B2Jun 28, 2011
Plasma reactor for processing a workpiece and having a tunable cathode
APPLIED MATERIALS INC11 citations83
US11022877B2Jun 1, 2021
Etch processing system having reflective endpoint detection
APPLIED MATERIALS INC2 citations72
US10535549B2Jan 14, 2020
Lift pin holder
APPLIED MATERIALS INC4 citations71
US12007686B2Jun 11, 2024
Etch processing system having reflective endpoint detection
APPLIED MATERIALS INC0 citations62
US8012366B2Sep 6, 2011
Process for etching a transparent workpiece including backside endpoint detection steps
APPLIED MATERIALS INC3 citations62
US10170280B2Jan 1, 2019
Plasma reactor having an array of plural individually controlled gas injectors arranged along a circular side wall
APPLIED MATERIALS INC0 citations51
US7682984B2Mar 23, 2010
Interferometer endpoint monitoring device
APPLIED MATERIALS INC0 citations51