Inventor

YASUHARA HIDEKI

JP2 patents

Patents

2 patents

US8753448B2Jun 17, 2014

Apparatus and method for manufacturing compound semiconductor, and compound semiconductor manufactured thereby

YASUHARA HIDEKI8 citations74

US9064696B2Jun 23, 2015

Apparatus for manufacturing compound semiconductor, method for manufacturing compound semiconductor, and compound semiconductor

YASUHARA HIDEKI1 citations42