Inventor
FANG JINGXUN
CN7 patents
⚠️ This page may combine multiple inventors who share the name “FANG JINGXUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHANGHAI HUALI MICROELECT CORP
5 patentsUS9449872B1Sep 20, 2016
Method for forming cobalt barrier layer and metal interconnection process
SHANGHAI HUALI MICROELECT CORP6 citations67
US10651285B2May 12, 2020
Method for avoiding IL regrown in a HKMG process
SHANGHAI HUALI MICROELECT CORP1 citations61
US8987101B2Mar 24, 2015
Method of forming strained source and drain regions in a P-type finFET structure
SHANGHAI HUALI MICROELECT CORP1 citations49
US8645879B2Feb 4, 2014
Algorithm of Cu interconnect dummy inserting
SHANGHAI HUALI MICROELECT CORP2 citations48
US8673768B2Mar 18, 2014
Fabrication method for improving surface planarity after tungsten chemical mechanical polishing
SHANGHAI HUALI MICROELECT CORP0 citations34