Inventor
PETZOLD DAVID T
US13 patents
Patents
13 patentsUS10249575B2Apr 2, 2019
Radio-frequency isolation using cavity formed in interface layer
SKYWORKS SOLUTIONS INC7 citations92
US9859225B2Jan 2, 2018
Backside cavity formation in semiconductor devices
SKYWORKS SOLUTIONS INC12 citations92
US9837362B2Dec 5, 2017
Cavity formation in interface layer in semiconductor devices
SKYWORKS SOLUTIONS INC9 citations92
US9831192B2Nov 28, 2017
Cavity formation in semiconductor devices
SKYWORKS SOLUTIONS INC13 citations92
US10665552B2May 26, 2020
Radio-frequency isolation cavities and cavity formation
SKYWORKS SOLUTIONS INC3 citations83
US10553549B2Feb 4, 2020
Cavity formation in backside interface layer for radio-frequency isolation
SKYWORKS SOLUTIONS INC3 citations83
US10249576B2Apr 2, 2019
Cavity formation using sacrificial material
SKYWORKS SOLUTIONS INC5 citations83
US10125011B2Nov 13, 2018
MEMS devices having discharge circuits
SKYWORKS SOLUTIONS INC5 citations72
US10991662B2Apr 27, 2021
Isolation cavities in semiconductor devices
SKYWORKS SOLUTIONS INC0 citations62
US10991661B2Apr 27, 2021
Radio-frequency isolation using backside cavities
SKYWORKS SOLUTIONS INC0 citations62
US10865101B2Dec 15, 2020
Discharge circuits, devices and methods
SKYWORKS SOLUTIONS INC1 citations62
US10658308B2May 19, 2020
Topside radio-frequency isolation cavity configuration
SKYWORKS SOLUTIONS INC0 citations51
US10553547B2Feb 4, 2020
Radio frequency isolation cavity formation using sacrificial material
SKYWORKS SOLUTIONS INC0 citations51