Inventor
KAWABE ATSUSHI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “KAWABE ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS11527426B2Dec 13, 2022
Substrate processing device
TOKYO ELECTRON LTD3 citations71
US11127614B2Sep 21, 2021
Substrate transfer method and substrate transfer apparatus
TOKYO ELECTRON LTD3 citations70
US12159798B2Dec 3, 2024
Transfer detection method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations50
US10896835B2Jan 19, 2021
Processing system
TOKYO ELECTRON LTD0 citations50
SUMITOMO LIGHT METAL IND
2 patentsUS4762168AAug 9, 1988
Condenser having apparatus for monitoring conditions of inner surface of condenser tubes
SUMITOMO LIGHT METAL IND29 citations89
US4776384AOct 11, 1988
Method for monitoring copper-alloy tubes for maintaining corrosion resistance and cleanliness factor of their inner surfaces
SUMITOMO LIGHT METAL IND7 citations70