Inventor
MUSA SAMI
NL14 patents
⚠️ This page may combine multiple inventors who share the name “MUSA SAMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS7460231B2Dec 2, 2008
Alignment tool for a lithographic apparatus
ASML NETHERLANDS BV9 citations84
US7863763B2Jan 4, 2011
Binary sinusoidal sub-wavelength gratings as alignment marks
ASML NETHERLANDS BV17 citations83
US7545520B2Jun 9, 2009
System and method for CD determination using an alignment sensor of a lithographic apparatus
ASML NETHERLANDS BV12 citations83
US7944063B2May 17, 2011
Application of 2-dimensional photonic crystals in alignment devices
ASML NETHERLANDS BV2 citations62
US7737566B2Jun 15, 2010
Alignment devices and methods for providing phase depth control
ASML NETHERLANDS BV2 citations62
US7598024B2Oct 6, 2009
Method and system for enhanced lithographic alignment
ASML NETHERLANDS BV2 citations61
US9280057B2Mar 8, 2016
Alignment measurement system, lithographic apparatus, and a method to determine alignment of in a lithographic apparatus
ASML NETHERLANDS BV0 citations51