Inventor

COANE PHILIP J

5 patents

⚠️ This page may combine multiple inventors who share the name “COANE PHILIP J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HUGHES AIRCRAFT CO

2 patents

US4283483AAug 11, 1981

Process for forming semiconductor devices using electron-sensitive resist patterns with controlled line profiles

HUGHES AIRCRAFT CO36 citations89

US4341850AJul 27, 1982

Mask structure for forming semiconductor devices, comprising electron-sensitive resist patterns with controlled line profiles

HUGHES AIRCRAFT CO19 citations79

UNIV LOUISIANA STATE

1 patent

US6482553B1Nov 19, 2002

Graphite mask for x-ray or deep x-ray lithography

UNIV LOUISIANA STATE24 citations87

IBM

1 patent

US4621232ANov 4, 1986

Inspection of unsintered single layer or multilayer ceramics using a broad area electrical contacting structure

IBM12 citations70

UNIV LOUISIANA TECH FOUNDATION

1 patent

US6713408B1Mar 30, 2004

Method of producing silica micro-structures from x-ray lithography of SOG materials

UNIV LOUISIANA TECH FOUNDATION2 citations53