Inventor
STEVENS JR LEONARD C
US4 patents
Patents
4 patentsUS6045434AApr 4, 2000
Method and apparatus of monitoring polishing pad wear during processing
IBM88 citations95
US6186864B1Feb 13, 2001
Method and apparatus for monitoring polishing pad wear during processing
IBM58 citations93
US5813082ASep 29, 1998
Pad and roller assembly for cleaning semiconductor wafers
IBM3 citations59
US6648979B2Nov 18, 2003
Apparatus and method for wafer cleaning
IBM6 citations58