Inventor
JURGENSEN CHARLES W
US6 patents
⚠️ This page may combine multiple inventors who share the name “JURGENSEN CHARLES W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
5 patentsUS6288454B1Sep 11, 2001
Semiconductor wafer having a layer-to-layer alignment mark and method for fabricating the same
LSI LOGIC CORP216 citations97
US6261406B1Jul 17, 2001
Confinement device for use in dry etching of substrate surface and method of dry etching a wafer surface
LSI LOGIC CORP64 citations95
US6136662AOct 24, 2000
Semiconductor wafer having a layer-to-layer alignment mark and method for fabricating the same
LSI LOGIC CORP39 citations91
US6852243B2Feb 8, 2005
Confinement device for use in dry etching of substrate surface and method of dry etching a wafer surface
LSI LOGIC CORP12 citations83
US6211051B1Apr 3, 2001
Reduction of plasma damage at contact etch in MOS integrated circuits
LSI LOGIC CORP18 citations82