Inventor
HEMKER DAVE J
US4 patents
Patents
4 patentsUS6251770B1Jun 26, 2001
Dual-damascene dielectric structures and methods for making the same
LAM RES CORP106 citations96
US7060605B2Jun 13, 2006
Methods for making dual-damascene dielectric structures
LAM RES CORP7 citations71
US6909190B2Jun 21, 2005
Dual-damascene dielectric structures
LAM RES CORP5 citations71
US7501339B2Mar 10, 2009
Methods for making dual-damascene dielectric structures
LAM RES CORP0 citations50