Inventor
MACWILLIAMS KENNETH P
US8 patents
⚠️ This page may combine multiple inventors who share the name “MACWILLIAMS KENNETH P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS6251770B1Jun 26, 2001
Dual-damascene dielectric structures and methods for making the same
LAM RES CORP106 citations96
US7060605B2Jun 13, 2006
Methods for making dual-damascene dielectric structures
LAM RES CORP7 citations71
US6909190B2Jun 21, 2005
Dual-damascene dielectric structures
LAM RES CORP5 citations71
US7501339B2Mar 10, 2009
Methods for making dual-damascene dielectric structures
LAM RES CORP0 citations50