P

Inventor

LIEGL BERNHARD R

US9 patents
⚠️ This page may combine multiple inventors who share the name “LIEGL BERNHARD R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

4 patents
US7239371B2Jul 3, 2007

Density-aware dynamic leveling in scanning exposure systems

IBM12 citations83
US7486097B2Feb 3, 2009

Proximity sensitive defect monitor

IBM10 citations82
US7176675B1Feb 13, 2007

Proximity sensitive defect monitor

IBM9 citations71
US8001495B2Aug 16, 2011

System and method of predicting problematic areas for lithography in a circuit design

IBM2 citations62

BRUNNER TIMOTHY A

2 patents
US8484586B2Jul 9, 2013

System and method of predicting problematic areas for lithography in a circuit design

BRUNNER TIMOTHY A1 citations61
US8239789B2Aug 7, 2012

System and method of predicting problematic areas for lithography in a circuit design

BRUNNER TIMOTHY A3 citations61

MENTOR GRAPHICS CORP

1 patent
US9075944B2Jul 7, 2015

System and method of predicting problematic areas for lithography in a circuit design

MENTOR GRAPHICS CORP1 citations62

SAPP BRIAN CHRISTOPHER

1 patent
US8792080B2Jul 29, 2014

Method and system to predict lithography focus error using simulated or measured topography

SAPP BRIAN CHRISTOPHER2 citations54

BRUNNER TIMOTHY ALLAN

1 patent
US8227180B2Jul 24, 2012

Photolithography focus improvement by reduction of autofocus radiation transmission into substrate

BRUNNER TIMOTHY ALLAN1 citations45