Inventor
RIVKIN MICHAEL
US14 patents
⚠️ This page may combine multiple inventors who share the name “RIVKIN MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
4 patentsUS7960297B1Jun 14, 2011
Load lock design for rapid wafer heating
NOVELLUS SYSTEMS INC44 citations96
US7941039B1May 10, 2011
Pedestal heat transfer and temperature control
NOVELLUS SYSTEMS INC36 citations90
US7176140B1Feb 13, 2007
Adhesion promotion for etch by-products
NOVELLUS SYSTEMS INC12 citations84
US9873946B2Jan 23, 2018
Multi-station sequential curing of dielectric films
NOVELLUS SYSTEMS INC3 citations72