Inventor
SALZMAN PHILIP M
US12 patents
⚠️ This page may combine multiple inventors who share the name “SALZMAN PHILIP M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS5597439AJan 28, 1997
Process gas inlet and distribution passages
APPLIED MATERIALS INC192 citations98
US6402885B2Jun 11, 2002
Magnetically enhanced inductively coupled plasma reactor with magnetically confined plasma
APPLIED MATERIALS INC42 citations96
US6030486AFeb 29, 2000
Magnetically confined plasma reactor for processing a semiconductor wafer
APPLIED MATERIALS INC55 citations96
US5538390AJul 23, 1996
Enclosure for load lock interface
APPLIED MATERIALS INC73 citations95
US5894887AApr 20, 1999
Ceramic dome temperature control using heat pipe structure and method
APPLIED MATERIALS INC70 citations94
US5643366AJul 1, 1997
Wafer handling within a vacuum chamber using vacuum
APPLIED MATERIALS INC97 citations93
US5777289AJul 7, 1998
RF plasma reactor with hybrid conductor and multi-radius dome ceiling
APPLIED MATERIALS INC35 citations92
US5630690AMay 20, 1997
Enclosure for load lock interface
APPLIED MATERIALS INC34 citations92
US6503367B1Jan 7, 2003
Magnetically enhanced inductively coupled plasma reactor with magnetically confined plasma
APPLIED MATERIALS INC5 citations74
US5378107AJan 3, 1995
Controlled environment enclosure and mechanical interface
APPLIED MATERIALS INC15 citations70
US6642489B2Nov 4, 2003
Method and apparatus for improving exhaust gas consumption in an exhaust conduit
APPLIED MATERIALS INC2 citations62