Inventor

NOGAMI TSUYOSHI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “NOGAMI TSUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents

US6744020B2Jun 1, 2004

Heat processing apparatus

TOKYO ELECTRON LTD24 citations90

US10359320B2Jul 23, 2019

Method of measuring a temperature of a heat plate and method thereof

TOKYO ELECTRON LTD3 citations69

US10120394B2Nov 6, 2018

Processing liquid supply device, processing liquid supply method, and storage medium

TOKYO ELECTRON LTD0 citations36

FURUSHO TOSHINOBU

1 patent

US9372405B2Jun 21, 2016

Chemical liquid supply method and chemical liquid supply system

FURUSHO TOSHINOBU3 citations68