Inventor
KAU KUO-CHANG
TW11 patents
Patents
11 patentsUS10018920B2Jul 10, 2018
Lithography patterning with a gas phase resist
TAIWAN SEMICONDUCTOR MFG CO LTD417 citations98
US9570302B1Feb 14, 2017
Method of patterning a material layer
TAIWAN SEMICONDUCTOR MFG CO LTD419 citations98
US10459352B2Oct 29, 2019
Mask cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations84
US9607833B2Mar 28, 2017
System and method for photomask particle detection
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12308233B2May 20, 2025
Dual critical dimension patterning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11921434B2Mar 5, 2024
Mask cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11740563B2Aug 29, 2023
Mask cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11256179B2Feb 22, 2022
Mask cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10514610B2Dec 24, 2019
Lithography patterning with a gas phase resist
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10685846B2Jun 16, 2020
Semiconductor integrated circuit fabrication with pattern-reversing process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41
US10825684B2Nov 3, 2020
Material composition and methods thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations37