Inventor
CHIEN MING-CHIN
TW16 patents
⚠️ This page may combine multiple inventors who share the name “CHIEN MING-CHIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
10 patentsUS10459352B2Oct 29, 2019
Mask cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations84
US10274838B2Apr 30, 2019
System and method for performing lithography process in semiconductor device fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10067418B2Sep 4, 2018
Particle removal system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9665007B2May 30, 2017
Rotary EUV collector
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11921434B2Mar 5, 2024
Mask cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11740563B2Aug 29, 2023
Mask cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11256179B2Feb 22, 2022
Mask cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10976672B2Apr 13, 2021
System and method for performing lithography process in semiconductor device fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US9429858B2Aug 30, 2016
Rotary EUV collector
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations52
US10685846B2Jun 16, 2020
Semiconductor integrated circuit fabrication with pattern-reversing process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41