Inventor
SU JUN-LIANG
SG7 patents
Patents
7 patentsUS10446423B2Oct 15, 2019
Next generation warpage measurement system
APPLIED MATERIALS INC4 citations69
US10325790B2Jun 18, 2019
Methods and apparatus for correcting substrate deformity
APPLIED MATERIALS INC3 citations67
US11929260B2Mar 12, 2024
Low warpage curing methodology by inducing curvature
APPLIED MATERIALS INC0 citations56
US11177146B2Nov 16, 2021
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC1 citations55
US9818624B2Nov 14, 2017
Methods and apparatus for correcting substrate deformity
APPLIED MATERIALS INC1 citations49
US11881436B2Jan 23, 2024
Pre and post processing metrology apparatus
APPLIED MATERIALS INC0 citations45
US11871667B2Jan 9, 2024
Methods and apparatus for warpage correction
APPLIED MATERIALS INC0 citations43