Inventor
TANG PEI-SHENG
TW5 patents
Patents
5 patentsUS11804410B2Oct 31, 2023
Thin-film non-uniform stress evaluation
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations69
US12581916B2Mar 17, 2026
Etch monitoring and performing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12120886B2Oct 15, 2024
Memory device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11749570B2Sep 5, 2023
Etch monitoring and performing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12374588B2Jul 29, 2025
Method for evaluating non-uniform stress
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59