Inventor
CADE PAUL E
5 patents
Patents
5 patentsUS4534804AAug 13, 1985
Laser process for forming identically positioned alignment marks on the opposite sides of a semiconductor wafer
IBM56 citations93
US4356730ANov 2, 1982
Electrostatically deformographic switches
IBM95 citations93
US4724043AFeb 9, 1988
Process for forming a master mold for optical storage disks
IBM34 citations91
US4599792AJul 15, 1986
Buried field shield for an integrated circuit
IBM32 citations89
US4157560AJun 5, 1979
Photo detector cell
IBM8 citations71