Inventor
TAKEISHI HIROAKI
JP27 patents
⚠️ This page may combine multiple inventors who share the name “TAKEISHI HIROAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
23 patentsUS5757149AMay 26, 1998
Drive control apparatus
CANON KK86 citations96
US5933215AAug 3, 1999
Exposure apparatus and device manufacturing method using the same
CANON KK50 citations92
US6462828B1Oct 8, 2002
Exposure apparatus
CANON KK14 citations84
US5625551AApr 29, 1997
Feedback controller
CANON KK18 citations83
US6897949B2May 24, 2005
Exposure apparatus and a device manufacturing method using the same
CANON KK5 citations74
US6573976B2Jun 3, 2003
Exposure apparatus, exposure method, and semiconductor device manufacturing method
CANON KK7 citations74
US6456374B1Sep 24, 2002
Exposure apparatus and a device manufacturing method using the same
CANON KK10 citations74
US6411365B1Jun 25, 2002
Exposure method and exposure apparatus
CANON KK7 citations74
US6256085B1Jul 3, 2001
Exposure apparatus
CANON KK7 citations74
US5841215ANov 24, 1998
Control apparatus for vibration wave motor
CANON KK15 citations74
US5691614ANov 25, 1997
Servo system adjusting method and servo control system
CANON KK12 citations74
US5625310AApr 29, 1997
Signal processing apparatus and displacement detecting apparatus using the same
CANON KK17 citations74
US5874799AFeb 23, 1999
Control device for a vibration driven motor
CANON KK11 citations73
US5612602AMar 18, 1997
Device and method comprising a motor and/or a digital signal processor, means for supplying signals of a plurality of channels in serial form, or means for causing an actuator to abut an object
CANON KK14 citations73
US5459369AOct 17, 1995
Control apparatus for travelling wave driven motor
CANON KK11 citations73
US5736822AApr 7, 1998
Vibration wave motor
CANON KK11 citations72
US7339662B2Mar 4, 2008
Exposure apparatus and a device manufacturing method using the same
CANON KK2 citations63
US7199878B2Apr 3, 2007
Scan exposure apparatus and method, and device manufacturing method
CANON KK2 citations63
US6630986B2Oct 7, 2003
Scanning type exposure apparatus and a device manufacturing method using the same
CANON KK4 citations63
US5945769AAug 31, 1999
Wave driven motor
CANON KK6 citations62
US7518717B2Apr 14, 2009
Exposure apparatus and a device manufacturing method using the same
CANON KK0 citations52
US6970244B2Nov 29, 2005
Scan exposure apparatus and method, and device manufacturing method
CANON KK1 citations52
US6859265B2Feb 22, 2005
Stage device, method of controlling same, and exposure apparatus
CANON KK1 citations52