Inventor
SPEE CAROLUS IDA MARIA ANTONIUS
NL11 patents
⚠️ This page may combine multiple inventors who share the name “SPEE CAROLUS IDA MARIA ANTONIUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS7868304B2Jan 11, 2011
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV17 citations83
US7561247B2Jul 14, 2009
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus
ASML NETHERLANDS BV10 citations79
US7935218B2May 3, 2011
Optical apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US7767989B2Aug 3, 2010
Ex-situ removal of deposition on an optical element
ASML NETHERLANDS BV1 citations60
US8830446B2Sep 9, 2014
Exposure apparatus
ASML NETHERLANDS BV0 citations50