Inventor
WASSINK ARNOUD CORNELIS
NL15 patents
⚠️ This page may combine multiple inventors who share the name “WASSINK ARNOUD CORNELIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
14 patentsUS7868304B2Jan 11, 2011
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV17 citations83
US7442948B2Oct 28, 2008
Contamination barrier and lithographic apparatus
ASML NETHERLANDS BV9 citations83
US7233010B2Jun 19, 2007
Radiation system and lithographic apparatus
ASML NETHERLANDS BV12 citations80
US7612353B2Nov 3, 2009
Lithographic apparatus, contaminant trap, and device manufacturing method
ASML NETHERLANDS BV8 citations79
US7485881B2Feb 3, 2009
Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system
ASML NETHERLANDS BV5 citations74
US7397056B2Jul 8, 2008
Lithographic apparatus, contaminant trap, and device manufacturing method
ASML NETHERLANDS BV7 citations67
US8018572B2Sep 13, 2011
Lithographic apparatus and radiation system
ASML NETHERLANDS BV2 citations62
US7889312B2Feb 15, 2011
Apparatus comprising a rotating contaminant trap
ASML NETHERLANDS BV2 citations62
US7453071B2Nov 18, 2008
Contamination barrier and lithographic apparatus comprising same
ASML NETHERLANDS BV2 citations62
US7426018B2Sep 16, 2008
Lithographic apparatus, illumination system and filter system
ASML NETHERLANDS BV4 citations62
US7365345B2Apr 29, 2008
Lithographic apparatus, radiation system and filter system
ASML NETHERLANDS BV4 citations62
US7696492B2Apr 13, 2010
Radiation system and lithographic apparatus
ASML NETHERLANDS BV6 citations61
US7602472B2Oct 13, 2009
Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device
ASML NETHERLANDS BV2 citations61
US8018576B2Sep 13, 2011
Contamination prevention system, a lithographic apparatus, a radiation source and a method for manufacturing a device
ASML NETHERLANDS BV0 citations41