Inventor
GUENTHER ROLF A
US10 patents
⚠️ This page may combine multiple inventors who share the name “GUENTHER ROLF A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS6915592B2Jul 12, 2005
Method and apparatus for generating gas to a processing chamber
APPLIED MATERIALS INC94 citations97
US6902947B2Jun 7, 2005
Integrated method for release and passivation of MEMS structures
APPLIED MATERIALS INC89 citations96
US5978202ANov 2, 1999
Electrostatic chuck having a thermal transfer regulator pad
APPLIED MATERIALS INC81 citations95
US7294208B2Nov 13, 2007
Apparatus for providing gas to a processing chamber
APPLIED MATERIALS INC30 citations92
US6830950B2Dec 14, 2004
Integrated method for release and passivation of MEMS structures
APPLIED MATERIALS INC27 citations91
US6916147B2Jul 12, 2005
Substrate storage cassette with substrate alignment feature
APPLIED MATERIALS INC20 citations90
US6900133B2May 31, 2005
Method of etching variable depth features in a crystalline substrate
APPLIED MATERIALS INC14 citations82
US7674338B2Mar 9, 2010
Heated substrate support and method of fabricating same
APPLIED MATERIALS INC3 citations57