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Inventor
KATTIGE KIRTHI K
US
2 patents
⚠️ This page may combine multiple inventors who share the name “KATTIGE KIRTHI K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SWAMINATHAN SHANKAR
1 patent
US8637411B2
Jan 28, 2014
Plasma activated conformal dielectric film deposition
SWAMINATHAN SHANKAR
99 citations
97
NOVELLUS SYSTEMS INC
1 patent
US8999859B2
Apr 7, 2015
Plasma activated conformal dielectric film deposition
NOVELLUS SYSTEMS INC
56 citations
96