Inventor

SCHWERTNER TILMAN

DE6 patents

⚠️ This page may combine multiple inventors who share the name “SCHWERTNER TILMAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

2 patents

US7869147B2Jan 11, 2011

Holding device for optical element

ZEISS CARL SMT GMBH5 citations60

US10203607B2Feb 12, 2019

Optical element unit for exposure processes

ZEISS CARL SMT GMBH0 citations50

HEINTEL WILLI

1 patent

US8441747B2May 14, 2013

Optical module with minimized overrun of the optical element

HEINTEL WILLI6 citations65

KUGLER JENS

1 patent

US8553202B2Oct 8, 2013

Projection objective for microlithography

KUGLER JENS0 citations48

ROSTALSKI HANS-JUERGEN

1 patent

US9086561B2Jul 21, 2015

Optical arrangement in a projection objective of a microlithographic projection exposure apparatus

ROSTALSKI HANS-JUERGEN0 citations47

SCHWERTNER TILMAN

1 patent

US9046795B2Jun 2, 2015

Optical element unit for exposure processes having sealing element

SCHWERTNER TILMAN1 citations44