Inventor

CAI GARY N

US3 patents

⚠️ This page may combine multiple inventors who share the name “CAI GARY N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED ION BEAM TECH INC

2 patents

US9431247B2Aug 30, 2016

Method for ion implantation

ADVANCED ION BEAM TECH INC1 citations48

US9748072B2Aug 29, 2017

Lower dose rate ion implantation using a wider ion beam

ADVANCED ION BEAM TECH INC0 citations37

AXCELIS TECH INC

1 patent

US7511287B2Mar 31, 2009

Systems and methods that mitigate contamination and modify surface characteristics during ion implantation processes through the introduction of gases

AXCELIS TECH INC5 citations52