Inventor
SAYAN SAFAK
BE5 patents
Patents
5 patentsUS9391141B2Jul 12, 2016
Method for producing fin structures of a semiconductor device in a substrate
IMEC VZW11 citations81
US10303048B2May 28, 2019
Metal of ceramic material hardened pattern
IMEC VZW0 citations50
US10192956B2Jan 29, 2019
Method for producing fin structures of a semiconductor device in a substrate
IMEC VZW0 citations49
US9905455B2Feb 27, 2018
Method for forming contact vias
IMEC VZW0 citations38
US9548208B2Jan 17, 2017
Method for patterning an underlying layer
IMEC VZW0 citations34