Inventor
MA CE
US13 patents
⚠️ This page may combine multiple inventors who share the name “MA CE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BOC GROUP INC
4 patentsUS6649540B2Nov 18, 2003
Organosilane CVD precursors and their use for making organosilane polymer low-k dielectric film
BOC GROUP INC30 citations92
US6440876B1Aug 27, 2002
Low-K dielectric constant CVD precursors formed of cyclic siloxanes having in-ring SI—O—C, and uses thereof
BOC GROUP INC37 citations92
US6572923B2Jun 3, 2003
Asymmetric organocyclosiloxanes and their use for making organosilicon polymer low-k dielectric film
BOC GROUP INC16 citations83
US6936537B2Aug 30, 2005
Methods for forming low-k dielectric films
BOC GROUP INC11 citations66