Inventor
BURKHART CHRISTOPHER WILLIAM
US5 patents
Patents
5 patentsUS10215317B2Feb 26, 2019
Additively manufactured gas distribution manifold
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Additively manufactured gas distribution manifold
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US10794519B2Oct 6, 2020
Additively manufactured gas distribution manifold
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US10483142B1Nov 19, 2019
Vacuum robot positioning system with reduced sensitivity to chamber pressure
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US11282737B2Mar 22, 2022
Moving substrate transfer chamber
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