Inventor
HEMKER DAVID J
US14 patents
⚠️ This page may combine multiple inventors who share the name “HEMKER DAVID J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
13 patentsUS9431268B2Aug 30, 2016
Isotropic atomic layer etch for silicon and germanium oxides
LAM RES CORP135 citations98
US6341574B1Jan 29, 2002
Plasma processing systems
LAM RES CORP135 citations97
US7356580B1Apr 8, 2008
Plug and play sensor integration for a process module
LAM RES CORP37 citations91
US10215317B2Feb 26, 2019
Additively manufactured gas distribution manifold
LAM RES CORP14 citations83
US10794519B2Oct 6, 2020
Additively manufactured gas distribution manifold
LAM RES CORP6 citations81
US7045019B1May 16, 2006
Method for performing site-specific backside particle and contamination removal
LAM RES CORP9 citations73
US6984162B2Jan 10, 2006
Apparatus methods for controlling wafer temperature in chemical mechanical polishing
LAM RES CORP7 citations73
US6736720B2May 18, 2004
Apparatus and methods for controlling wafer temperature in chemical mechanical polishing
LAM RES CORP6 citations73
US6937915B1Aug 30, 2005
Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control
LAM RES CORP11 citations72
US6925348B2Aug 2, 2005
Methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control
LAM RES CORP9 citations72
US7520284B2Apr 21, 2009
Apparatus for developing photoresist and method for operating the same
LAM RES CORP4 citations62
US7029368B2Apr 18, 2006
Apparatus for controlling wafer temperature in chemical mechanical polishing
LAM RES CORP3 citations62
US9871759B2Jan 16, 2018
Social network service for semiconductor manufacturing equipment and users
LAM RES CORP1 citations48