Inventor
LEE CHING-YING
TW8 patents
Patents
8 patentsUS5591672AJan 7, 1997
Annealing of titanium - titanium nitride in contact hole
VANGUARD INT SEMICONDUCT CORP38 citations91
US5552340ASep 3, 1996
Nitridation of titanium, for use with tungsten filled contact holes
VANGUARD INT SEMICONDUCT CORP33 citations91
US5849640ADec 15, 1998
In-situ SOG etchback and deposition for IMD process
VANGUARD INT SEMICONDUCT CORP38 citations88
US6008137ADec 28, 1999
Pattern formation of silicon nitride
VANGUARD INT SEMICONDUCT CORP15 citations72
US5922622AJul 13, 1999
Pattern formation of silicon nitride
VANGUARD INT SEMICONDUCT CORP14 citations72
US5846880ADec 8, 1998
Process for removing titanium nitride layer in an integrated circuit
VANGUARD INT SEMICONDUCT CORP8 citations72
US6107201AAug 22, 2000
Aluminum spiking inspection method
VANGUARD INT SEMICONDUCT CORP5 citations61
US6446252B1Sep 3, 2002
Photomask method for making the same capacitor cell area near outmost cell arrays
VANGUARD INT SEMICONDUCT CORP1 citations51