Inventor

KAKEHI RYOICHI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KAKEHI RYOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NUFLARE TECHNOLOGY INC

2 patents

US11658002B2May 23, 2023

Charged particle beam adjustment method, charged particle beam drawing method, and charged particle beam irradiation apparatus

NUFLARE TECHNOLOGY INC0 citations46

US11037759B2Jun 15, 2021

Multi charged particle beam writing apparatus and multi charged particle beam writing method

NUFLARE TECHNOLOGY INC0 citations46

SAKAI MICHIHIRO

1 patent

US8076649B2Dec 13, 2011

Charged particle beam writing apparatus and optical axis deviation correcting method for charged particle beam

SAKAI MICHIHIRO2 citations50