Inventor
IMAI YUTA
JP11 patents
⚠️ This page may combine multiple inventors who share the name “IMAI YUTA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
8 patentsUS9570268B2Feb 14, 2017
Electron gun, charged particle gun, and charged particle beam apparatus using electron gun and charged particle gun
HITACHI HIGH TECH CORP6 citations72
US10014151B2Jul 3, 2018
Composite charged particle beam device
HITACHI HIGH TECH CORP2 citations71
US11264201B2Mar 1, 2022
Charged particle beam device
HITACHI HIGH TECH CORP3 citations67
US12431325B2Sep 30, 2025
Sample image observation device and method for same
HITACHI HIGH TECH CORP0 citations61
US11823861B2Nov 21, 2023
Charged particle beam device
HITACHI HIGH TECH CORP0 citations61
US12027342B2Jul 2, 2024
Charged particle beam device and axis adjustment method thereof
HITACHI HIGH TECH CORP0 citations60
US11764028B2Sep 19, 2023
Charged particle beam device and axis adjustment method thereof
HITACHI HIGH TECH CORP0 citations60
US11342155B2May 24, 2022
Charged particle beam device and method for adjusting position of detector of charged particle beam device
HITACHI HIGH TECH CORP0 citations60