Inventor
CHEN YEN-JI
TW4 patents
Patents
4 patentsUS11854841B2Dec 26, 2023
Space filling device for wet bench
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11482430B2Oct 25, 2022
Space filling device for wet bench
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11348818B2May 31, 2022
Slit door assembly and method of operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations53
US12374530B2Jul 29, 2025
Semiconductor processing apparatus for generating plasma
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46