Inventor
ADDEPALLI SAI SUSMITA
US7 patents
Patents
7 patentsUS11530482B2Dec 20, 2022
Faceplate having a curved surface
APPLIED MATERIALS INC1 citations70
US11339475B2May 24, 2022
Film stack overlay improvement
APPLIED MATERIALS INC2 citations70
US12110590B2Oct 8, 2024
Faceplate having a curved surface
APPLIED MATERIALS INC0 citations60
US12094689B2Sep 17, 2024
Switchable delivery for semiconductor processing system
APPLIED MATERIALS INC0 citations60
US11851759B2Dec 26, 2023
Faceplate having a curved surface
APPLIED MATERIALS INC0 citations60
US12159785B2Dec 3, 2024
Dynamic multi zone flow control for a processing system
APPLIED MATERIALS INC0 citations58
US11798803B2Oct 24, 2023
Dynamic multi zone flow control for a processing system
APPLIED MATERIALS INC0 citations58