Inventor
KESHRI ABHIGYAN
US4 patents
Patents
4 patentsUS12094689B2Sep 17, 2024
Switchable delivery for semiconductor processing system
APPLIED MATERIALS INC0 citations60
US12159785B2Dec 3, 2024
Dynamic multi zone flow control for a processing system
APPLIED MATERIALS INC0 citations58
US11798803B2Oct 24, 2023
Dynamic multi zone flow control for a processing system
APPLIED MATERIALS INC0 citations58
US11776835B2Oct 3, 2023
Power supply signal conditioning for an electrostatic chuck
APPLIED MATERIALS INC0 citations58