Inventor
SONG MYUNGGEUN
KR5 patents
⚠️ This page may combine multiple inventors who share the name “SONG MYUNGGEUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS9716162B2Jul 25, 2017
Semiconductor device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD3 citations71
US10714472B2Jul 14, 2020
Semiconductor devices and methods of fabricating the same
SAMSUNG ELECTRONICS CO LTD1 citations61
US12449375B2Oct 21, 2025
Inspection method, substrate processing method including the same, and substrate processing device using the substrate processing method
SAMSUNG ELECTRONICS CO LTD0 citations45
US12125687B2Oct 22, 2024
System of semiconductor process and control method thereof
SAMSUNG ELECTRONICS CO LTD0 citations44