Inventor
CHANG CHIA-HSUN
TW5 patents
Patents
5 patentsUS12521838B2Jan 13, 2026
Microwave and infrared heating units for wet chemicals
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11517995B2Dec 6, 2022
Wet chemical heating system and a method of chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12472538B2Nov 18, 2025
Apparatus for cleaning semiconductor equipment
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11318506B2May 3, 2022
Apparatus for cleaning semiconductor equipment
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US10868241B2Dec 15, 2020
Apparatus for polarizing a semiconductor wafer and method for fabricating a magnetic semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations42