Inventor
BENJAMIN NEIL MARTIN PAUL
US26 patents
⚠️ This page may combine multiple inventors who share the name “BENJAMIN NEIL MARTIN PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
20 patentsUS7497614B2Mar 3, 2009
Apparatus for determining a temperature of a substrate and methods therefor
LAM RES CORP468 citations98
US5793192AAug 11, 1998
Methods and apparatuses for clamping and declamping a semiconductor wafer in a wafer processing system
LAM RES CORP60 citations89
US9673025B2Jun 6, 2017
Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control
LAM RES CORP10 citations83
US10896808B2Jan 19, 2021
Maintenance mode power supply system
LAM RES CORP2 citations73
US7578616B2Aug 25, 2009
Apparatus for determining a temperature of a substrate and methods therefor
LAM RES CORP7 citations73
US10475623B2Nov 12, 2019
Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods
LAM RES CORP1 citations72
US10192767B2Jan 29, 2019
Ceramic electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control
LAM RES CORP2 citations72
US10079168B2Sep 18, 2018
Ceramic electrostatic chuck including embedded Faraday cage for RF delivery and associated methods for operation, monitoring, and control
LAM RES CORP2 citations72
US10014161B2Jul 3, 2018
Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control
LAM RES CORP3 citations72
US11676798B2Jun 13, 2023
Cooling for a plasma-based reactor
LAM RES CORP0 citations62
US11101107B2Aug 24, 2021
Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods
LAM RES CORP0 citations62
US10892179B2Jan 12, 2021
Electrostatic chuck including clamp electrode assembly forming portion of Faraday cage for RF delivery and associated methods
LAM RES CORP1 citations62
US8991331B2Mar 31, 2015
Integrated steerability array arrangement for minimizing non-uniformity and methods thereof
LAM RES CORP2 citations62
US7802917B2Sep 28, 2010
Method and apparatus for chuck thermal calibration
LAM RES CORP4 citations62
US12237155B2Feb 25, 2025
Magnetic shielding for plasma sources
LAM RES CORP0 citations61
US11177067B2Nov 16, 2021
Magnetic shielding for plasma sources
LAM RES CORP1 citations61
US12368057B2Jul 22, 2025
Enhanced closed loop gas based heat exchange
LAM RES CORP0 citations52
US10395901B2Aug 27, 2019
Plasma ignition and sustaining apparatus
LAM RES CORP0 citations52
US9530679B2Dec 27, 2016
Method and apparatus for chuck thermal calibration
LAM RES CORP0 citations52
US10812033B2Oct 20, 2020
High-power radio-frequency spiral-coil filter
LAM RES CORP0 citations36