Inventor
POVOLNY HENRY
US15 patents
⚠️ This page may combine multiple inventors who share the name “POVOLNY HENRY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
13 patentsUS9508529B2Nov 29, 2016
System, method and apparatus for RF power compensation in a plasma processing system
LAM RES CORP123 citations97
US9652567B2May 16, 2017
System, method and apparatus for improving accuracy of RF transmission models for selected portions of an RF transmission path
LAM RES CORP9 citations84
US9224583B2Dec 29, 2015
System and method for heating plasma exposed surfaces
LAM RES CORP9 citations84
US9673025B2Jun 6, 2017
Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control
LAM RES CORP10 citations83
US9502221B2Nov 22, 2016
Etch rate modeling and use thereof with multiple parameters for in-chamber and chamber-to-chamber matching
LAM RES CORP4 citations73
US10879053B2Dec 29, 2020
Temperature controlled substrate support assembly
LAM RES CORP5 citations72
US10475623B2Nov 12, 2019
Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods
LAM RES CORP1 citations72
US10192767B2Jan 29, 2019
Ceramic electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control
LAM RES CORP2 citations72
US10079168B2Sep 18, 2018
Ceramic electrostatic chuck including embedded Faraday cage for RF delivery and associated methods for operation, monitoring, and control
LAM RES CORP2 citations72
US10014161B2Jul 3, 2018
Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control
LAM RES CORP3 citations72
US9082594B2Jul 14, 2015
Etch rate modeling and use thereof for in-chamber and chamber-to-chamber matching
LAM RES CORP3 citations63
US11101107B2Aug 24, 2021
Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods
LAM RES CORP0 citations62
US10892179B2Jan 12, 2021
Electrostatic chuck including clamp electrode assembly forming portion of Faraday cage for RF delivery and associated methods
LAM RES CORP1 citations62
DHINDSA RAJINDER
2 patentsUS8216486B2Jul 10, 2012
Temperature control module using gas pressure to control thermal conductance between liquid coolant and component body
DHINDSA RAJINDER131 citations97
US8083855B2Dec 27, 2011
Temperature control module using gas pressure to control thermal conductance between liquid coolant and component body
DHINDSA RAJINDER25 citations90