Inventor
RICCI ANTHONY J
US15 patents
⚠️ This page may combine multiple inventors who share the name “RICCI ANTHONY J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
12 patentsUS8038796B2Oct 18, 2011
Apparatus for spatial and temporal control of temperature on a substrate
LAM RES CORP21 citations92
US9673025B2Jun 6, 2017
Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control
LAM RES CORP10 citations83
US8735298B2May 27, 2014
Method for spatial and temporal control of temperature on a substrate
LAM RES CORP4 citations83
US8051556B2Nov 8, 2011
Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate
LAM RES CORP4 citations73
US10475623B2Nov 12, 2019
Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods
LAM RES CORP1 citations72
US10192767B2Jan 29, 2019
Ceramic electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control
LAM RES CORP2 citations72
US10079168B2Sep 18, 2018
Ceramic electrostatic chuck including embedded Faraday cage for RF delivery and associated methods for operation, monitoring, and control
LAM RES CORP2 citations72
US10014161B2Jul 3, 2018
Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control
LAM RES CORP3 citations72
US11302556B2Apr 12, 2022
Apparatus for spatial and temporal control of temperature on a substrate
LAM RES CORP0 citations62
US11101107B2Aug 24, 2021
Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods
LAM RES CORP0 citations62
US10892179B2Jan 12, 2021
Electrostatic chuck including clamp electrode assembly forming portion of Faraday cage for RF delivery and associated methods
LAM RES CORP1 citations62
US10636689B2Apr 28, 2020
Apparatus for spatial and temporal control of temperature on a substrate
LAM RES CORP0 citations51